Note: a method for estimating the resolution of nanopositioning systems.
نویسنده
چکیده
This Note describes a new technique for estimating the resolution of nanopositioning systems. By recording the voltage applied to an actuator and performing a filtering operation, the position noise and resolution can be estimated. This technique is simple to apply in practice and does not require any additional sensors or specialized equipment.
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عنوان ژورنال:
- The Review of scientific instruments
دوره 83 8 شماره
صفحات -
تاریخ انتشار 2012